Vibrating disk type micro-gyroscope

Details Vibrating disk type micro-gyroscope Vibrating disk type micro-gyroscope

1996-07-05

1998-07-21

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01P 904

Patent

active

057837490

ABSTRACT:
A vibrating disk type micro-gyroscope and a method of manufacture thereof are disclosed. The micro-gyroscope includes a support platform for supporting a vibrating disk, the vibrating disk converting a resonance frequency into two beat frequencies, a bottom detection electrode for detecting the angular velocity of the gyroscope from a detection of the electrostatic capacitance changes between the bottom detection electrode and the vibrating disk, and an upper drive electrode for exciting the vibrating disk. The method includes the steps of: depositing an insulator layer, a polycrystalline silicon layer, the bottom detection layer, and the bottom sacrificial layer; dry etching the bottom sacrificial layer; depositing polycrystalline silicon doped with dopants; dry etching every area except the support platform and the vibrating disk; depositing an oxide upper sacrificial layer; and forming a pattern and then wet etching the upper sacrificial layer and the bottom sacrificial layer.

REFERENCES:
patent: 4655081 (1987-04-01), Burdess
patent: 5329815 (1994-07-01), Dunn et al.
patent: 5533394 (1996-07-01), Wan
IEEE Publication entitled "A Micromachined comb-drive tuning fork rate gyroscope" pp. 143-148.

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