4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Bevan Staple

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Free-space optical wavelength routing element based on...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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MEMS-based noncontacting free-space optical switch

Optical waveguides – With optical coupler – Switch
Reexamination Certificate

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Method for reducing leaching in metal-coated MEMS

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Method for reducing leaching in metal-coated MEMS

Coating processes – Electrical product produced
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Method to reduce release time of micromachined devices

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
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Profile ID: LFUS-PAI-P-2569614

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