4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Bernd Kastenmeier

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Air gaps between conductive lines for reduced RC delay of...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having air-gap dielectric
Reexamination Certificate

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Highly selective chemical dry etching of silicon nitride over si

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Sidewall sealing of porous dielectric materials

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1209377

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