4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Benjamin Schwarz

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Gate etch process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Gate etch process

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for plasma etching a microelectronic topography using...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2729115

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