4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Ion implantation of dopant into semiconductor region

Benjamin B. Riordon

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Masked ion implant with fast-slow scan

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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System and method for multi-wafer scanning in ion implanters

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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System and method for serial ion implanting productivity...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2374119

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