Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
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Metal barrier cap fabrication by polymer lift-off
Metal barrier cap fabrication by polymer lift-off
Metal barrier cap fabrication by polymer lift-off
Method of cobalt silicidation using an oxide-Titanium...
Protruded contact and insertion of inter-layer-dielectric...
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