4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...

Bao-Ru Young

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High aspect ratio contact

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Main spacer trim-back method for replacement gate process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for making a semiconductor device having metal gate...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method for spin coating a high viscosity liquid on a wafer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of cleaning a copper/porous low-k dual damascene etch

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1816635

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