4. Optics: measuring and testing
  5. Dimension
  6. Thickness

Avi Ravid

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Method and apparatus for monitoring a chemical mechanical...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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Method and apparatus for monitoring a chemical mechanical...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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Method and system for monitoring a process of material...

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrophotometer
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Optical measurements of patterned structures

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
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Test structure for metal CMP process control

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Profile ID: LFUS-PAI-P-2081228

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