Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrophotometer
Reexamination Certificate
2005-04-26
2005-04-26
Smith, Zandra (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrophotometer
C356S504000
Reexamination Certificate
active
06885446
ABSTRACT:
A method and system are presented for use in controlling a process of material removal from the surface of a patterned structure, by measuring at least one of residue, erosion, dishing and corrosion effects in the structure induced by this process. The structure is imaged utilizing phase modulation of light reflected from the structure, and a phase map of the structure is thereby obtained. This phase map is analyzed and data indicative of light reflective properties of layer stacks of the structure is utilized to determine a phase difference between light reflected from a selected measured site and at least one reference site spaced-apart from the selected site. The phase difference is thus indicative of the measured effect.
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Ravid et al., “Copper CMP Planarity Control Using ITM”, Sep. 12-14, 2000, 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, pp. 437-443.
Machavariani Vladimir
Ravid Avi
Scheiner David
Weingarten Amit
Browdy and Neimark , P.L.L.C.
Geisel Kara
Nova Measuring Instruments Ltd.
Smith Zandra
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