4. Refrigeration
  5. Gas compression, heat regeneration and expansion, e.g.,...

Atsuyuki Miura

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Multi-headed cryopump apparatus

Refrigeration – Gas compression – heat regeneration and expansion – e.g.,...
Patent

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Multi-stage pump device

Pumps – Successive stages
Reexamination Certificate

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Multistage vacuum pump unit

Pumps – Condition responsive control of pump drive motor – Plural pumps having separate drive motors – supply sources,...
Patent

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Vacuum pumping apparatus

Pumps – Motor driven – Electric or magnetic motor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-856223

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