Multistage vacuum pump unit

Details Multistage vacuum pump unit Multistage vacuum pump unit

1997-12-01

2000-05-02

Thorpe, Timothy S.

Pumps

Condition responsive control of pump drive motor

Plural pumps having separate drive motors, supply sources,...

417 19, 417 441, 417 32, 417243, 417286, F04B 4106

Patent

active

060565101

ABSTRACT:
A multistage vacuum pump unit having a plurality of separate single-stage pumps connected in series with each other by exhaust pipes, the exhaust pipes each connecting a suction port of one of the adjacent single-stage pumps with an exhaust port of another of the adjacent single-stage pump; motors for driving the separate single-stage pumps respectively; driving device for varying a revolution of one of the single-stage pumps that is at least in contact with an atmospheric side; driving current detection device for detecting a driving current of the motor for driving the single-stage pump that is in contact with the atmospheric side; pressure detection device for detecting a pressure at a vacuum-side inlet; and control device for controlling revolutions of the motors of the single-stage pumps based on the pressure detected by the pressure detection device.

REFERENCES:
patent: 3584977 (1971-06-01), Coleman, II et al.
patent: 4279574 (1981-07-01), Kunderman
patent: 5158436 (1992-10-01), Jensen et al.
patent: 5496393 (1996-03-01), Otsuka et al.
patent: 5584914 (1996-12-01), Senoo et al.
patent: 5746581 (1998-05-01), Okumura et al.
patent: 5971711 (1999-10-01), Noji et al.

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