Multi-headed cryopump apparatus

Details Multi-headed cryopump apparatus Multi-headed cryopump apparatus

1990-03-30

1991-04-30

Capossela, Ronald C.

Refrigeration

Gas compression, heat regeneration and expansion, e.g.,...

62 555, F25B 900

Patent

active

050107372

ABSTRACT:
A multi-headed cryopump apparatus includes a plurality of cryopumps driven by a common compressor. There is a valve system between each cryopump and the compressor. A motor is provided for driving each cryopump, and a sensor is provided for detecting the amount of current supplied to each motor. By use of a control system, which accepts input from the sensors, the valve systems are controlled such that they operate in turn with a constant cycle.

REFERENCES:
patent: 4485631 (1984-12-01), Winkler
patent: 4614093 (1986-09-01), Bachler et al.
patent: 4679401 (1987-07-01), Lessard et al.
patent: 4757689 (1988-07-01), Bachler et al

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