4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Atsushi Tamada

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Apparatus for heat-treating wafers

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Line width measuring device and method

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent

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Measuring apparatus

Optics: measuring and testing – Position or displacement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-329641

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