Line width measuring device and method

Details Line width measuring device and method Line width measuring device and method

1985-11-26

1987-04-21

LaRoche, Eugene R.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356387, G01N 2186

Patent

active

046599363

ABSTRACT:
A line width measuring device for measuring the line width in an extremely fine pattern formed on a photo-mask or wafer employs a photo-electric converter, including a one-dimensional image sensor array, to convert a magnified image of the pattern into serial output signals storable in digitized form. Compensation and averaging of the stored image element information data are performed in known manner and the results are used to detect pattern edges and hence the line width. In one embodiment the one-dimensional image sensor array can be deviated along the array's axis within the inter-element pitch of the array to enhance the precision of line width measurement.

REFERENCES:
patent: 4385837 (1983-05-01), Schram
patent: 4585947 (1986-04-01), Liptay-Wagner et al.

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