Atsushi Someya

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Functional optical element having a non-flat planar interface wi

Patent

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Heat treatment apparatus and method of semiconductor wafer

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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High precision stepping aligner having a spiral stepping pattern

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Light modulating device

Patent

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Method for projection exposure to light

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Profile ID: LFUS-PAI-P-319926

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