High precision stepping aligner having a spiral stepping pattern

Details High precision stepping aligner having a spiral stepping pattern High precision stepping aligner having a spiral stepping pattern

1992-03-19

1994-05-10

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, 359848, G01B 902

Patent

active

053112822

ABSTRACT:
A high precision stepping aligner includes a stage for carrying thereon an object and drivable to move the object stepwise relative to an exposing position so as to align a plurality of portions of the object in succession with the exposing position, where each of the portions is exposed to exposure light. The stage is moved stepwise first in the X-direction and then in the Y-direction. Thereafter, the stepping movement in the X-direction and the stepping movement in the Y-direction are repeated one after another so that the stage traces a substantially spiral stepping pattern. A mirror for reflecting a beam of light for positioning the stage is disposed on the stage with a heat insulating material interposed therebetween.

REFERENCES:
patent: 4764003 (1988-08-01), Lake et al.
patent: 4780615 (1988-10-01), Suzuki

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