4. Coating apparatus
  5. Gas or vapor deposition

Atsuo Kitazawa

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Jig for semiconductor wafers and method for producing the same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Vertical boat and a method for making the same

Supports: racks – Special article – Platelike
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Vertical wafer boat

Coating apparatus – Gas or vapor deposition
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Profile ID: LFUS-PAI-P-1338909

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