4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant

Atsunori Terasaki

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Deflector, method of manufacturing deflector, and charged...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Liquid delivery device

Fluid handling – Flow affected by fluid contact – energy field or coanda effect – Means to regulate or vary operation of device
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Method for manufacturing semiconductor device by using dual...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for manufacturing semiconductor device by using dual...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for manufacturing semiconductor device by using dual...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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