4. Etching a substrate: processes
  5. Planarizing a nonplanar surface

Atomic Telecom

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Atomic layer controlled optical filter design for next...

Optical: systems and elements – Light interference – Produced by coating or lamina
Reexamination Certificate

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Chemical-organic planarization process for atomically smooth...

Etching a substrate: processes – Planarizing a nonplanar surface
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High throughput high-yield vacuum deposition system

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Method of constructing optical filters by atomic layer...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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