4. Abrasive tool making process, material, or composition
  5. With inorganic material
  6. Clay, silica, or silicate

Ashutosh Misra

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Acidic chemistry for post-CMP cleaning

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Acidic chemistry for Post-CMP cleaning using a composition...

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Alkaline chemistry for post-CMP cleaning

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Alkylsilanes as solvents for low vapor pressure precursors

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Reexamination Certificate

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Benign method for etching silicon dioxide

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
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Profile ID: LFUS-PAI-P-1110271

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