4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Applied Material Inc.

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Embedded waveguide detectors

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate

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High temperature filter for CVD apparatus

Coating apparatus – Gas or vapor deposition
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In situ Etching of inorganic dielectric anti-reflective coating

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Manufacture of target for use in magnetron sputtering of...

Metal treatment – Process of modifying or maintaining internal physical... – With casting or solidifying from melt
Reexamination Certificate

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Method using TEOS ramp-up during TEOS/ozone CVD for improved...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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