4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Anthony R. Phillips, Jr.

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Imaging system for deep ultraviolet lithography

Optical: systems and elements – Lens – With reflecting element
Patent

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Lens system for X-ray projection lithography camera

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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X-ray projection lithography camera

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Profile ID: LFUS-PAI-P-816109

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