4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Electron beam imaging

Anseime Chen

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Alignment mark design

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
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Low-K dual damascene integration process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for avoiding photo residue in dual damascene with...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for planarizing barc layer in dual damascene process

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Method of forming dual damascene structure

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-1671164

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