4. Coating processes
  5. Coating by vapor, gas, or smoke

Annette Saenger

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Deposition method for a transition-metal-containing dielectric

Semiconductor device manufacturing: process – Making passive device
Reexamination Certificate

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Memory cell arrangement and method of fabricating it

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method and device for depositing thin layers via ALD/CVD...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Method for chemical-mechanical polishing of a layer which is...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Method for production of a metallic or metal-containing layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2724999

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