4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Multiple layers

Anjana M. Patel

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Reactive ion etching for semiconductor device feature...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Remote plasma clean process with cycled high and low...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Stress management for tensile films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2229896

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