4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Anicon, Inc.

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition process

Coating processes – Coating by vapor – gas – or smoke
Patent

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Chemical vapor deposition wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Chemical vapor deposition wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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