Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With heating or cooling means for apparatus part other than...
Reexamination Certificate
2007-03-06
2007-03-06
Ahmed, Shamim (Department: 1765)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With heating or cooling means for apparatus part other than...
C156S345350, C118S7230AN, C118S7230MW, C118S724000
Reexamination Certificate
active
10765445
ABSTRACT:
A device and method for controlling the temperature of a plasma chamber inside wall or other surfaces exposed to the plasma by a plurality of temperature control systems. A plasma process within the plasma chamber can be controlled by independently controlling the temperature of segments of the wall or other surfaces.
REFERENCES:
patent: 5477975 (1995-12-01), Rice et al.
patent: 6113732 (2000-09-01), Yoshida et al.
patent: 0 838 841 (1998-04-01), None
patent: WO 99/25494 (1999-05-01), None
Fink Steven T
Jones William D
Long Maolin
Mitrovic Andrej S
Moroz Paul
Ahmed Shamim
Tokyo Electron Limited
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