4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Andreas Geiss

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Machine for coating a substrate, and module

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputter apparatus with a pipe cathode and method for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2221187

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