4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Andre Cardoso

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Method for detecting an endpoint for an oxygen free plasma...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Radiant heating apparatus and method

Electric resistance heating devices – Heating devices – Radiant heater
Patent

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Temperature probe and measurement method for low pressure proces

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-1338929

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