Radiant heating apparatus and method

Details Radiant heating apparatus and method Radiant heating apparatus and method

1998-08-17

2000-02-08

Jeffery, John A.

Electric resistance heating devices

Heating devices

Radiant heater

392421, 118724, 219405, H01L 21205

Patent

active

060235551

ABSTRACT:
A radiant heating apparatus for reducing the cumulative temperature gradient over a semiconductor workpiece during a low temperature process is comprised of a plurality of reflecting units, wherein each reflecting unit is comprised of a back reflector, a tubular reflector extending from the back reflector towards the workpiece, and a radiant energy source disposed in the tubular reflector in front of the back reflector, wherein a cross section of the tubular reflector is in the shape of a truncated segment of a circle.

REFERENCES:
patent: 4891499 (1990-01-01), Moslehi
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5158644 (1992-10-01), Cheung et al.
patent: 5179677 (1993-01-01), Anderson
patent: 5418885 (1995-05-01), Hauser
patent: 5485985 (1996-01-01), Eppeland
patent: 5504831 (1996-04-01), Sandhu
patent: 5561612 (1996-10-01), Thakur
patent: 5740314 (1998-04-01), Grimm

Affiliated with

Also associated with

Rating

Radiant heating apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Radiant heating apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radiant heating apparatus and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1687094