4. Coating apparatus
  5. Condition responsive control

An-Chun Tu

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Gas delivering device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Installation to supply gas

Coating apparatus – Condition responsive control
Patent

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Method for improving interlevel dielectric gap filling over...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for improving interlevel dielectric gap filling over...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of low-K/copper dual damascene

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-899264

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