4. Radiant energy
  5. Invisible radiant energy responsive electric signalling
  6. Infrared responsive

Alexey Goder

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Carousel wafer transfer system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Carousel wafer transfer system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Method and apparatus for improved substrate handling

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method and apparatus for improved substrate handling

Heating – With work cooling structure – Work holder having selectively usable heating and cooling...
Reexamination Certificate

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Respiratory gas analyzer

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent

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Profile ID: LFUS-PAI-P-365505

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