4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Alexander M. Paterson

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Cathode liner with wafer edge gas injection in a plasma...

Coating apparatus – Gas or vapor deposition – With treating means
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Method to control uniformity using tri-zone showerhead

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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