4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Alex Goldenshtein

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Alternating phase-shift mask inspection method and apparatus

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Inspection system and a method for aerial reticle inspection

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2420569

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