4. Abrading
  5. Work holder
  6. Vacuum

Aleksander A. Owczarz

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Active retaining ring support

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Adjustable force applying air platen and spindle system, and...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Oscillating chemical mechanical planarization apparatus

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Oscillating fixed abrasive CMP system and methods for...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Polishing pad ironing system

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2439542

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