4. Abrading
  5. Work holder
  6. Work rotating

Alejandro Reyes

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Slurry distributor for chemical mechanical polishing...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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System and method for CMP having multi-pressure zone loading...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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System and method for CMP having multi-pressure zone loading...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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System and method for CMP head having multi-pressure annular...

Abrading – Work holder – Work rotating
Reexamination Certificate

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System and method for pneumatic diaphragm CMP head having...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2587726

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