4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Albert Engelhardt

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Method for producing insulation structures

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Micromechanical enclosure

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2289539

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