4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Alan Morrison

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Chemical vapor deposition chamber

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Chemical vapor deposition chamber

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Etch chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Etch chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Profile ID: LFUS-PAI-P-1015418

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