4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Akitake Tamura

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Film formation apparatus and method of using the same

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Heat-processing method for semiconductor process under a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for forming silicon epitaxial layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Pattern forming method, semiconductor device manufacturing...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2301435

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