4. Organic compounds -- part of the class 532-570 series
  5. Organic compounds
  6. Halogen containing

Akira Sekiya

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Cleaning gas and etching gas

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – Specific organic component
Reexamination Certificate

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Cleaning gases and etching gases

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Device for cleaning CVD device and method of cleaning CVD...

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Reexamination Certificate

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Dry etching gas

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-338004

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