4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Akinobu Kakimoto

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Method for forming SrTiO 3 film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Processing device using shower head structure and processing...

Coating processes – Coating by vapor – gas – or smoke – Base supplied constituent
Reexamination Certificate

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Single-substrate-heat-processing apparatus and method for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2504327

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