Corporate Assignee
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
Corporate Assignee
active
No affiliations
Apparatus for performing jet vapor reduction of the thickness of
Controlling an etching process of multiple layers based upon...
Method of using scatterometry measurements to determine and...
Phase-shift photomask for patterning high density features
Semiconductor device having ultra shallow junctions and a...
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