4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Adam Brailove

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Batch processing platform for ALD and CVD

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Ion beam mass separation filter, mass separation method...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method for treating substrates and films with photoexcitation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2746039

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