4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Using film of etchant between a stationary surface and a...

A. Daniel Feller

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Abrasives for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Abrasives for chemical mechanical polishing

Compositions – Etching or brightening compositions
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Ceric-ion slurry for use in chemical-mechanical polishing

Abrasive tool making process – material – or composition – With inorganic material
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High PH slurry for chemical mechanical polishing of copper

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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High pH slurry for chemical mechanical polishing of copper

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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