4. Abrasive tool making process, material, or composition
  5. With inorganic material

A. Blair Hughes

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Chemical mechanical polishing systems and methods for their use

Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate

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Global planarization method

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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