Chemical mechanical polishing systems and methods for their use

Details Chemical mechanical polishing systems and methods for their use Chemical mechanical polishing systems and methods for their use

2005-01-11

2005-01-11

Deo, Duy-Vu (Department: 1765)

Abrasive tool making process, material, or composition

With inorganic material

C438S691000, C438S692000, C438S693000

Reexamination Certificate

active

06840971

ABSTRACT:
Alpha-amino acid containing chemical mechanical polishing compositions and slurries that are useful for polishing substrates including multiple layers of metals, or metals and dielectrics.

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