- LandOfFree
- Inventors
- Semiconductor device manufacturing: process
- Chemical etching
- Vapor phase etching
Details
Axel Henke
Axel
Henke
- Patent Class
Semiconductor device manufacturing: process
- SubClass
Chemical etching
- SubSubClass
Vapor phase etching
- Specialty
Inventor
- Status
active
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Profile ID: LFUS-PAI-P-2830876
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