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- Semiconductor device manufacturing: process
- Formation of electrically isolated lateral semiconductive...
- Grooved and refilled with deposited dielectric material
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Wolfgang Lehnert
Wolfgang
Lehnert
- Patent Class
Semiconductor device manufacturing: process
- SubClass
Formation of electrically isolated lateral semiconductive...
- SubSubClass
Grooved and refilled with deposited dielectric material
- Specialty
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active
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Profile ID: LFUS-PAI-P-2188765
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