Thin oxide structure and method

Details Thin oxide structure and method Thin oxide structure and method

1990-02-28

1991-10-15

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437235, 437239, 148DIG118, H01L 21316

Patent

active

050574639

ABSTRACT:
A method for forming a thin oxide layer structure includes the step of first growing a dry oxide layer. A layer grown in steam and chlorine is formed next, followed by a final dry oxide layer. An anneal step in an inert gas further improves the quality of the oxide layer. The structure formed by such a process provides a layer of steam grown oxide sandwiched between two layers of oxide grown in a dry atmosphere.

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