Semiconductor wafer particle extractor

Details Semiconductor wafer particle extractor Semiconductor wafer particle extractor

1993-10-29

1995-12-19

Moore, Chris K.

Brushing, scrubbing, and general cleaning

Machines

With air blast or suction

15311, 414433, 414757, A47L 538

Patent

active

054758920

ABSTRACT:
An alignment apparatus for aligning the flat edges on semiconductor wafers has a roller 13 used to turn the wafers 12 during alignment. The roller 13 is hollow and has a plurality of holes 14 in the surface of the roller though which a vacuum is drawn to remove particle contaminates from and around the semiconductor wafers.

REFERENCES:
patent: 3004276 (1961-10-01), Hoffman
patent: 3005223 (1961-10-01), Taylor et al.
patent: 3150401 (1964-09-01), Taylor et al.
patent: 3345075 (1967-10-01), Phillipson et al.
patent: 3479222 (1969-11-01), David et al.
patent: 3765051 (1973-10-01), Wanat
patent: 4662811 (1987-05-01), Hayden
patent: 4750505 (1988-06-01), Inuta et al.
patent: 5054988 (1991-10-01), Shiraiwa

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